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Application of perfluoroether sealing rings in the semiconductor field
In semiconductor equipment, the failure of inconspicuous seals can lead to a direct strike of the equipment. The operation of vacuum plasma cleaning machines is no exception. There are many types of seals, and the applicable parts are different. The selection of seals is the key to the sealing performance of a vacuum plasma cleaning machine. In fact, there are ways to choose the right seal. Today, we will introduce the three main types of seals used in vacuum plasma cleaning machines and their corresponding parts, hoping to be helpful to everyone.
There are three main types of seals used on vacuum plasma cleaning machines, the first being O-ring seals, the second being pipeline support seals, and the third being sealing gaskets.
1. O-ring used on vacuum plasma cleaning machine
O-rings are a type of rubber sealing ring with a circular cross-section. Due to its O-shaped cross-section, they are called O-rings. O-ring is one of the most common sealing components in mechanical design.
There are many advantages of O-ring seals. First, let me give a few prominent advantages. Firstly, the manufacturing of O-ring seals is very simple, and the raw materials are also relatively ordinary rubber components, so the price is relatively cheap; Secondly, the O-ring has strong wear resistance and reliable sealing performance; Finally, the O-ring seal is easy to install and operate. picture
The O-ring is mainly used in the connection between the vacuum chamber and other components of the vacuum plasma cleaning machine, playing a sealing role, such as the sealing between the vacuum chamber and the vacuum door, the sealing between the feeding electrode and the vacuum chamber, and the sealing between the true cavity and the vacuum pipeline.
2. Pipeline support seals used on vacuum plasma cleaning machines
The pipeline bracket seal is a type of seal used to connect the external pipeline of a vacuum plasma cleaning machine with the pipeline. The pipeline bracket seal is generally used in conjunction with a vacuum clamp. When used, the pipeline bracket seal is placed between the pipeline and the pipeline, and then locked with a vacuum clamp. Through the compression of the vacuum clamp, the pipeline clamps the pipeline bracket seal, ultimately achieving a sealing effect, It is a common sealing method between pipelines.
The main advantage of pipeline support seals is that they are very easy to install and do not require the use of tools; Good sealing performance. The pipeline support seal is mainly used at the connection between vacuum pipelines in vacuum plasma cleaning machines.
3. Sealing gaskets used on vacuum plasma cleaning machines
Sealing gasket is a type of sealing element used for machinery and equipment with fluid. Sealing gasket is a metal or non-metallic plate material made by cutting, stamping, or cutting processes, mainly used for sealing connections between machine components.